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1700°C九通道混氣高真空CVD系統
關鍵字:
CVD、三溫區、九路質子
型號:
GSL-1700X-HVC9
產品概述:
GSL-1700X-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.
免責聲明: 本站產品介紹內容(包括產品圖片、產品描述、技術參數等)僅用于宣傳用途,僅供參考。由于更新不及時和網站不可預知的BUG可能會造成數據與實物的偏差,請勿復制或者截圖。如果您對參數有異議,或者想了解產品詳細信息及更多參數,請與本公司銷售人員聯系。本站提供的信息不構成任何要約或承諾,請勿將此參數用于招標文件或者合同,科晶公司會不定期完善和修改網站任何信息,恕不另行通知,請您諒解。 如果您需要下載產品的電子版技術文檔,說明書(在線閱覽),裝箱單,與售后安裝條件等文件,請點擊上方的附件下載模塊中選取。商城產品僅針對大陸地區客戶,購買前請與工作人員溝通,以免給您帶來不便。
技術參數產品視頻實驗案例警示/應用提示配件詳情
Furnace Structure

· Double layer steel casing with air cooling. 

· Two cooling fans inside to keep  case temperature < 55oC.

· 內爐膛表面涂有美國進口的高溫氧化鋁涂層可以提高設備的加熱效率,同時也可以延長爐膛的使用壽命

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High purity Alumina refractory chamber

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Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.

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Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.


Power

 6 Kw


Voltage

AC 208-240V Single Phase, 50/60 Hz


Heating Element

8?pcs1800oC grade MoSi2?heating element


Max. Temperature

1650 oC (< 2hours )(更新時間:19.12.10--JS2)



Continuous Temperature

1600 oC


Max. Heating Rate

≤5  oC /min


Tube Size and Materials

Premier Grade alumina tube made in USA.

(標配尺寸) ( 60mm) O.D.x I.D. (54mm) x 1000mm Length

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(選配尺寸) ( 80mm) O.D.x I.D. (74mm) x  1000mm Length 

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Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).
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Heating Zone

Heating zone length: 457 mm (18")

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Constant Temperature Zone length: 150 mm (6")(+/-1oC) 注:由于測量手段及外部環境的影響,測量結果可能會有偏差,此參數僅供參考不作為該設備的技術指標。您購買產品需要準確的恒溫區數據,請與我公司銷售人員聯系 


Temperature controllers

One precision digital temperature controller programmable with 50 segments.

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PID adjustable with auto tune function to ensure temperature stability within  +/- 1 oC.    

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控溫儀表操作視頻

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Full protection in each controller for over-temperature and broken thermal couple.


Thermal Couple

B type thermal couples built in


Vacuum Flanges

· Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.

· Double high temperature silicone O-ring for using under 300oC.

Porous alumina blocks included for protecting flange from heat radiation.


Vacuum pumps

 Tow stages vacuum pump installed in bottom case:

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OneDouble Steps Rotary Vane High Speed Mechanical Vacuum Pump- T2XZ-4C110with max. vacuum pressure of 10-2 torr.  

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One turbo molecular pump with max. vacuum pressure of 2x10-5 torr.

One precision vacuum sensor installed. 

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Stainless steel hose tube is included for connecting to tube furnace.

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Digital vacuum meter / controller installed.


Vacuum Sensor & display

Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

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Vacuum controller and display areinstalled in bottom mobile cart.

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Gas flow meter User Manual?(Click to download)

· 9?precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-100% of full scale) 

· 3 MFC at range 0 - 1000scc

· 3 MFC at range 0 - 200scc

· 3 MFC at range 0 - 10 scc

· one floating meter will be installed for N2 gas only

· one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.

· 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
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Software and interface (optional at extra cost).  Please click uderline for software operation instruction

         blob.png 

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Pipe connection,? valves and gas mixer

· SS 316 1/4" pipe/fitting

· SS 316 vacuum needle valves

· 21 sets of stainless steel vacuum valves are installed outside of  right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.

Please click here to see sketch of pipe connection.

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Dimension

Furnace: 550 x 380 x 520  Bottom Mobile case: 600x600x597


Net Weight

about 100 kg


Shipping weight

200 Lbs 


Shipping package size after crating

Two cases in one plastic pallet: 45x45x35/case


Warranty & certificate

One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)

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免責聲明: 本站產品介紹內容(包括產品圖片、產品描述、技術參數等)僅用于宣傳用途,僅供參考。由于更新不及時和網站不可預知的BUG可能會造成數據與實物的偏差,請勿復制或者截圖。如果您對參數有異議,或者想了解產品詳細信息及更多參數,請與本公司銷售人員聯系。本站提供的信息不構成任何要約或承諾,請勿將此參數用于招標文件或者合同,科晶公司會不定期完善和修改網站任何信息,恕不另行通知,請您諒解。 如果您需要下載產品的電子版技術文檔,說明書(在線閱覽),裝箱單,與售后安裝條件等文件,請點擊上方的附件下載模塊中選取。商城產品僅針對大陸地區客戶,購買前請與工作人員溝通,以免給您帶來不便。
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